Last modification

17th of March 2017

AlGaN-on-Si-based 10 μm pixel-to-pixel pitch hybrid imagers for the EUV range



P. E. Malinowski, J-Y Duboz, P. De Moor, J. John, K. Minoglou, P. Srivastava, F. Semond, E. Frayssinet, B. Giordanengo, A. BenMoussa, U. Kroth, A. Gottwald, C. Laubis, R. Mertens and C. Van Hoof.
IEEE Electron Device Letters, 32 (11), pp. 1561-1563, 2011.