Last modification

17th of March 2017

Radiation hardness of AlxGa1-xN photodetectors exposed to Extreme UltraViolet (EUV) light beam



P. Malinowski, J John, F Barkusky, J.-Y. Duboz, A. Lorenz, K. Cheng, Joff Derluyn, M. Germain, Piet de Moor, Kyriaki Minoglou, A. Bayer, K. Mann, J.-F. Hochedez, B. Giordanengo, G. Borghs, R. Mertens
Damage to VUV, EUV, and X-Ray Optics II. Edited by Juha, Libor; Bajt, Saša; Sobierajski, Ryszard. Proceedings of SPIE 7361, 73610T-73610T-8 (2009)