Last modification

18th of April 2017

AlxGa1-xN focal plane arrays for imaging applications in the extreme ultraviolet (EUV) wavelength range



J. John, P. Malinowski, A. Lorenz, G. Hellings, K. Cheng, M. Germain, F. Semond, J-Y Duboz, A. BenMoussa, J.-F. Hochedez, U. Koth and M. Richter.
Proc SPIE, 6585, 658505 (2007)